TSM 664 - Testsystem für statische Messungen an Leistungshalbleitern
- Automated testing of modules in production
- Testing of the static electrical characteristics of power semiconductors and modules

Features
- Blocking voltage measurement up to 8 kV
- Reverse current measurement up to 300 mA
- Forward voltage measurement up to 4,000 A, max. 500 µs
- VP-Measurement
- gfs-measurement
- Measurement of Gate leakage current in a range from 1 nA to 10 mA
- Gate charge measurement from 0 to 50 µC
- Multiplexer with 9 channels
Description
The TSM 664 is used in the testing of power semiconductors and power semiconductor modules with up to 9 high power terminals.
The test system consists of up to 6 components and is fully variable dependant on test requirements.
The standard version includes:
1. GSG 664 Gate-Stress-Device: test voltage up to 75 V, pulse duration adjustable in a range from 10 to 100 µs ± 1 µs. 2. GM 664 Gate measuring device: test voltage up to 75 V, Gate leakage current measured from 1 nA to 10 mA. 3. IO 625 Input-/Output extension 4. SML 664 Blocking voltage tester: Blocking voltage measured up to 8 kV, reverse current measured up to 300 mA. 5. MU 664 Multiplexer (9 ch) 9 x 4,000 A (main current path) 9 x 2 A (Sense terminals) 2 x 9 x 2 A (Gate terminals) 9 x 2 A (aux. Emitter terminals) Proof voltage: > 8,000 V. The MU 664 is used to connect the system components with the DUT terminals. 6. DM 664 Forward voltage measuring device: current pulses up to 4,000 A, 500 µs, VP-measurement, gfs-measurement.
The test system is controlled via PC, connected by 2 serial interfaces. The user friendly software allows the simple creation of test routines as well as the classification of the DUT test results.